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1

Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-Electromechanical Systems?

Liu, Zhengjun, Vahanissi, Ville, Chekurov, Nikolai, Tittonen, Ilkka, Savin, Hele

Journal:

Journal of Microelectromechanical Systems

Year:

2019

Language:

english

File:

PDF, 14.72 MB

english, 2019

2

Excellent passivation and low reflectivity with atomic layer deposited bilayer coatings for n-type silicon solar cells

Lee, Benjamin G., Li, Shuo, von Gastrow, Guillaume, Yli-Koski, Marko, Savin, Hele, Malinen, Ville, Skarp, Jarmo, Choi, Sukgeun, Branz, Howard M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 398 KB

english, 2014

3

High-efficiency black silicon interdigitated back contacted solar cells on p-type and n-type c-Si substrates

Ortega, Pablo, Calle, Eric, von Gastrow, Guillaume, Repo, Päivikki, Carrió, David, Savin, Hele, Alcubilla, Ramón

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2015

Language:

english

File:

PDF, 3.75 MB

english, 2015

4

Review of light-induced degradation in crystalline silicon solar cells

Lindroos, Jeanette, Savin, Hele

Journal:

Solar Energy Materials and Solar Cells

Year:

2016

Language:

english

File:

PDF, 682 KB

english, 2016

5

Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Vähänissi, Ville, Haarahiltunen, Antti, Talvitie, H., Asghar, M.I., Yli-Koski, Marko, Savin, Hele

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 327 KB

english, 2009

6

[IEEE 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Portland, OR, USA (2016.6.5-2016.6.10)] 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Silicon surface passivation with atomic layer deposited aluminum nitride

Repo, Paivikki, Bao, Yameng, Seppanen, Heli, Sippola, Perttu, Savin, Hele

Year:

2016

Language:

english

File:

PDF, 452 KB

english, 2016

7

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

Savin, Hele, Repo, Päivikki, von Gastrow, Guillaume, Ortega, Pablo, Calle, Eric, Garín, Moises, Alcubilla, Ramon

Journal:

Nature Nanotechnology

Year:

2015

Language:

english

File:

PDF, 2.68 MB

english, 2015

8

Electronic Quality Improvement of Highly Defective Quasi-Mono Silicon Material by Phosphorus Diffusion Gettering

Liu, Zhengjun, Vähänissi, Ville, Laine, Hannu S., Lindeberg, Morten, Yli-Koski, Marko, Savin, Hele

Journal:

Advanced Electronic Materials

Year:

2017

Language:

english

File:

PDF, 1.19 MB

english, 2017

9

Light-induced degradation in quasi-monocrystalline silicon PERC solar cells: Indications on involvement of copper

Vahlman, Henri, Wagner, Matthias, Wolny, Franziska, Krause, Andreas, Laine, Hannu, Inglese, Alessandro, Yli-Koski, Marko, Savin, Hele

Journal:

physica status solidi (a)

Year:

2017

Language:

english

File:

PDF, 1.57 MB

english, 2017

10

Experimental study of iron redistribution between bulk defects and boron doped layer in silicon wafers

Heli Talvitie, Marko Yli-Koski, Antti Haarahiltunen, Ville Vähänissi, Muhammad Imran Asghar, Hele Savin

Journal:

physica status solidi (a)

Year:

2011

Language:

english

File:

PDF, 389 KB

english, 2011

11

Detection of Nickel in Silicon by Recombination Lifetime Measurements

Savin, Hele, Yli-Koski, Marko, Haarahiltunen, A., Talvitie, H., Sinkkonen, Juha

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 271 KB

english, 2008

12

Light-induced degradation in copper-contaminated gallium-doped silicon

Lindroos, Jeanette, Yli-Koski, Marko, Haarahiltunen, Antti, Schubert, Martin C., Savin, Hele

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2013

Language:

english

File:

PDF, 309 KB

english, 2013

13

Light-induced Degradation in Multicrystalline Silicon: The Role of Copper

Inglese, Alessandro, Focareta, Alessia, Schindler, Florian, Schön, Jonas, Lindroos, Jeanette, Schubert, Martin C., Savin, Hele

Journal:

Energy Procedia

Year:

2016

Language:

english

File:

PDF, 393 KB

english, 2016

14

Recombination activity of light-activated copper defects in p -type silicon studied by injection- and temperature-dependent lifetime spectroscopy

Inglese, Alessandro, Lindroos, Jeanette, Vahlman, Henri, Savin, Hele

Journal:

Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 2.01 MB

english, 2016

15

Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina

Bihari, Nupur, Heikkinen, Ismo T. S., Marin, Giovanni, Ekstrum, Craig, Mayville, Pierce J., Oberloier, Shane, Savin, Hele, Karppinen, Maarit, Pearce, Joshua M.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 4.16 MB

2020

16

Micro-photoluminescence spectroscopy on metal precipitates in silicon

Paul Gundel, Martin C. Schubert, Wolfram Kwapil, Jonas Schön, Manfred Reiche, Hele Savin, Marko Yli-Koski, Juan Angel Sans, Gema Martinez-Criado, Winfried Seifert, Wilhelm Warta, Eicke R. Weber

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2009

Language:

english

File:

PDF, 1.08 MB

english, 2009

17

Reduction of Light-induced Degradation of Boron-doped Solar-grade Czochralski Silicon by Corona Charging

Boulfrad, Yacine, Lindroos, Jeanette, Inglese, Alessandro, Yli-Koski, Marko, Savin, Hele

Journal:

Energy Procedia

Year:

2013

Language:

english

File:

PDF, 281 KB

english, 2013

18

[IEEE 2012 IEEE 38th Photovoltaic Specialists Conference (PVSC) - Austin, TX, USA (2012.06.3-2012.06.8)] 2012 38th IEEE Photovoltaic Specialists Conference - Diffusion gettering of metal impurities in crystalline silicon

Savin, Hele, Vahanissi, Ville, Yli-Koski, Marko, Talvitie, Heli, Haarahiltunen, Antti

Year:

2012

Language:

english

File:

PDF, 1.62 MB

english, 2012

19

Impact of Iron Precipitation on Phosphorus-Implanted Silicon Solar Cells

Laine, Hannu S., Vahanissi, Ville, Morishige, Ashley E., Hofstetter, Jasmin, Haarahiltunen, Antti, Lai, Barry, Savin, Hele, Fenning, David P.

Journal:

IEEE Journal of Photovoltaics

Year:

2016

Language:

english

File:

PDF, 1.70 MB

english, 2016

20

Full recovery of red zone in p-type high-performance multicrystalline silicon

Vähänissi, Ville, Laine, Hannu S., Liu, Zhengjun, Yli-Koski, Marko, Haarahiltunen, Antti, Savin, Hele

Journal:

Solar Energy Materials and Solar Cells

Year:

2017

Language:

english

File:

PDF, 1.49 MB

english, 2017

21

Approaches to open source 3-D printable probe positioners and micromanipulators for probe stations

Hietanen, Iiro, Heikkinen, Ismo T.S., Savin, Hele, Pearce, Joshua M.

Journal:

Year:

2018

Language:

english

File:

PDF, 5.14 MB

english, 2018

22

Impact of black silicon on light- and elevated temperature-induced degradation in industrial passivated emitter and rear cells

Pasanen, Toni P., Modanese, Chiara, Vähänissi, Ville, Laine, Hannu S., Wolny, Franziska, Oehlke, Alexander, Kusterer, Christian, Heikkinen, Ismo T.S., Wagner, Matthias, Savin, Hele

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2018

Language:

english

File:

PDF, 1.40 MB

english, 2018

23

Handbook of Silicon Based MEMS Materials and Technologies || Oxygen and Bulk Microdefects in Silicon

Year:

2015

Language:

english

File:

PDF, 689 KB

english, 2015

24

Long-term Stability of Al2O3 Passivated Black Silicon

Calle, Eric, Ortega, Pablo, von Gastrow, Guillaume, Martín, Isidro, Savin, Hele, Alcubilla, Ramón

Journal:

Energy Procedia

Year:

2016

Language:

english

File:

PDF, 270 KB

english, 2016

25

Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition

Bao, Yameng, Huang, Haibing, Zhu, Zhen, Lv, Jun, Savin, Hele

Journal:

Energy Procedia

Year:

2016

Language:

english

File:

PDF, 368 KB

english, 2016

26

Data of the recombination loss mechanisms analysis on Al 2 O 3 PERC cell using PC1D and PC2D simulations

Huang, Haibing, Lv, Jun, Bao, Yameng, Xuan, Rongwei, Sun, Shenghua, Sneck, Sami, Li, Shuo, Modanese, Chiara, Savin, Hele, Wang, Aihua, Zhao, Jianhua

Journal:

Year:

2017

Language:

english

File:

PDF, 472 KB

english, 2017

27

Effect of low-temperature annealing on defect causing copper-related light-induced degradation in p-type silicon

Vahlman, Henri, Haarahiltunen, Antti, Kwapil, Wolfram, Schön, Jonas, Yli-Koski, Marko, Inglese, Alessandro, Modanese, Chiara, Savin, Hele

Journal:

Energy Procedia

Year:

2017

Language:

english

File:

PDF, 958 KB

english, 2017

28

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

Zhu, Zhen, Merdes, Saoussen, Ylivaara, Oili M. E., Mizohata, Kenichiro, Heikkilä, Mikko J., Savin, Hele

Journal:

physica status solidi (a)

Year:

2019

Language:

english

File:

PDF, 914 KB

english, 2019

29

Experimental evidence on removing copper and light-induced degradation from silicon by negative charge

Boulfrad, Yacine, Lindroos, Jeanette, Wagner, Matthias, Wolny, Franziska, Yli-Koski, Marko, Savin, Hele

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 804 KB

english, 2014

30

[IEEE 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC) - Washington, DC (2017.6.25-2017.6.30)] 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) - Toward Effective Gettering in Boron-Implanted Silicon Solar Cells

Laine, Hannu S., Vahanissi, Ville, Liu, Zhengjun, Magana, Ernesto, Morishige, Ashley E., Krugener, Jan, Salo, Kristian, Savin, Hele, Lai, Barry, Fenning, David P.

Year:

2017

Language:

english

File:

PDF, 7 KB

english, 2017

31

Impact of phosphorus gettering parameters and initial iron level on silicon solar cell properties

Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2012

Language:

english

File:

PDF, 390 KB

english, 2012

32

Enhanced performance in the deteriorated area of multicrystalline silicon wafers by internal gettering

Boulfrad, Yacine, Haarahiltunen, Antti, Savin, Hele, Øvrelid, Eivind J., Arnberg, Lars

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2015

Language:

english

File:

PDF, 2.66 MB

english, 2015

33

Measurement of Copper in p-Type Silicon Using Charge-Carrier Lifetime Methods

Yli-Koski, Marko, Savin, Hele, Saarnilehto, E., Haarahiltunen, A., Sinkkonen, Juha, Berenyi, G., Pavelka, T.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 286 KB

english, 2005

34

Analysis of the Atomic Layer Deposited Al2O3 field-effect passivation in black silicon

von Gastrow, Guillaume, Alcubilla, Ramon, Ortega, Pablo, Yli-Koski, Marko, Conesa-Boj, Sònia, Fontcuberta i Morral, Anna, Savin, Hele

Journal:

Solar Energy Materials and Solar Cells

Year:

2015

Language:

english

File:

PDF, 5.75 MB

english, 2015

35

Main defect reactions behind phosphorus diffusion gettering of iron

Schön, Jonas, Vähänissi, Ville, Haarahiltunen, Antti, Schubert, Martin C., Warta, Wilhelm, Savin, Hele

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 828 KB

english, 2014

36

Nanometer-Scale Depth-Resolved Atomic Layer Deposited SiO 2 Thin Films Analyzed by Glow Discharge Optical Emission Spectroscopy

Zhu, Zhen, Modanese, Chiara, Sippola, Perttu, Di Sabatino, Marisa, Savin, Hele

Journal:

physica status solidi (a)

Year:

2017

Language:

english

File:

PDF, 2.28 MB

english, 2017

37

Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide

Repo, Päivikki, Benick, Jan, Gastrow, Guillaume von, Vähänissi, Ville, Heinz, Friedemann D., Schön, Jonas, Schubert, Martin C., Savin, Hele

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2013

Language:

english

File:

PDF, 461 KB

english, 2013

38

N-type Black Silicon Solar Cells

Repo, Päivikki, Benick, Jan, Vähänissi, Ville, Schön, Jonas, von Gastrow, Guillaume, Steinhauser, Bernd, Schubert, Martin C., Hermle, Martin, Savin, Hele

Journal:

Energy Procedia

Year:

2013

Language:

english

File:

PDF, 1.11 MB

english, 2013

39

[IEEE 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Portland, OR, USA (2016.6.5-2016.6.10)] 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Mixed aluminum precursor in the atomic layer deposited Al2O3 for effective silicon emitter passivation

Bao, Yameng, Huang, Haibing, Lv, Jun, Savin, Hele

Year:

2016

Language:

english

File:

PDF, 525 KB

english, 2016

40

SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 24 April 2017)] Optical Sensors 2017 - Black silicon n-type photodiodes with high response over wide spectral range

Baldini, Francesco, Homola, Jiri, Lieberman, Robert A., Heinonen, Juha, Juntunen, Mikko A., Laine, Hannu S., Vähänissi, Ville, Repo, Päivikki, Dönsberg, Timo, Savin, Hele

Year:

2017

Language:

english

File:

PDF, 1.19 MB

english, 2017

41

Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition

Repo, Päivikki, Haarahiltunen, Antti, Sainiemi, Lauri, Yli-Koski, Marko, Talvitie, Heli, Schubert, Martin C., Savin, Hele

Journal:

IEEE Journal of Photovoltaics

Year:

2013

Language:

english

File:

PDF, 577 KB

english, 2013

42

Gettering of Iron in Silicon Solar Cells With Implanted Emitters

Vahanissi, Ville, Haarahiltunen, Antti, Yli-Koski, Marko, Savin, Hele

Journal:

IEEE Journal of Photovoltaics

Year:

2014

Language:

english

File:

PDF, 3.90 MB

english, 2014

43

Chemical compatibility of fused filament fabrication-based 3-D printed components with solutions commonly used in semiconductor wet processing

Heikkinen, Ismo T.S., Kauppinen, Christoffer, Liu, Zhengjun, Asikainen, Sanja M., Spoljaric, Steven, Seppälä, Jukka V., Savin, Hele, Pearce, Joshua M.

Journal:

Additive Manufacturing

Year:

2018

Language:

english

File:

PDF, 1.13 MB

english, 2018

44

Influence of plasma parameters on the properties of ultrathin Al 2 O 3 films prepared by plasma enhanced atomic layer deposition below 100 °C for moisture barrier applications

Zhu, Zhen, Sippola, Perttu, Lipsanen, Harri, Savin, Hele, Merdes, Saoussen

Journal:

Japanese Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 776 KB

english, 2018

45

[IEEE 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC) - Washington, DC (2017.6.25-2017.6.30)] 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) - Metallized Boron-Doped Black Silicon Emitters For Front Contact Solar Cells

von Gastrow, Guillaume, Savin, Hele, Calle, Eric, Ortega, Pablo, Alcubilla, Ramon, Daniil, Andreana, Stutz, Elias Z., i Morral, Anna Fontcuberta, Husein, Sebastian, Nietzold, Tara, Bertoni, Mariana

Year:

2017

File:

PDF, 7 KB

2017

46

Data of ALD Al 2 O 3 rear surface passivation, Al 2 O 3 PERC cell performance, and cell efficiency loss mechanisms of Al 2 O 3 PERC cell

Huang, Haibing, Lv, Jun, Bao, Yameng, Xuan, Rongwei, Sun, Shenghua, Sneck, Sami, Li, Shuo, Modanese, Chiara, Savin, Hele, Wang, Aihua, Zhao, Jianhua

Journal:

Year:

2017

Language:

english

File:

PDF, 1.09 MB

english, 2017

47

Atomic layer deposited aluminum oxide mitigates outgassing from fused filament fabricationâbased 3-D printed components

Heikkinen, Ismo T.S., Marin, Giovanni, Bihari, Nupur, Ekstrum, Craig, Mayville, Pierce J., Fei, Yuhuan, Hu, Yun Hang, Karppinen, Maarit, Savin, Hele, Pearce, Joshua M.

Journal:

Surface and Coatings Technology

Year:

2020

File:

PDF, 2.98 MB

2020

48

Luminescent (Er,Ho)2O3 thin films by ALD to enhance the performance of silicon solar cells

Ghazy, Amr, Safdar, Muhammad, Lastusaari, Mika, Aho, Arto, Tukiainen, Antti, Savin, Hele, Guina, Mircea, Karppinen, Maarit

Journal:

Solar Energy Materials and Solar Cells

Year:

2021

File:

PDF, 1.73 MB

2021

49

Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction

Juntunen, Mikko A., Heinonen, Juha, Vähänissi, Ville, Repo, Päivikki, Valluru, Dileep, Savin, Hele

Journal:

Nature Photonics

Year:

2016

Language:

english

File:

PDF, 3.56 MB

english, 2016

50

Effective passivation of p + and n + emitters using SiO 2 /Al 2 O 3 /SiN x stacks: Surface passivation mechanisms and application to industrial p-PERT bifacial Si solar cells

Huang, Haibing, Modanese, Chiara, Sun, Shenghua, von Gastrow, Guillaume, Wang, Jianbo, Pasanen, Toni P., Li, Shuo, Wang, Lichun, Bao, Yameng, Zhu, Zhen, Sneck, Sami, Savin, Hele

Journal:

Solar Energy Materials and Solar Cells

Year:

2018

Language:

english

File:

PDF, 1.27 MB

english, 2018

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